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Triple-Target Magnetron Sputtering System for High‑Performance Thin‑Film Deposition

The Triple‑Target Magnetron Sputtering System delivers stable, high‑precision thin‑film deposition for both research and industrial applications. It supports multiple materials, ensures excellent film uniformity, and offers flexible process control for advanced coating development.

Technical Parameters

The Triple‑Target Magnetron Sputtering System delivers stable, high‑precision thin‑film deposition for both research and industrial applications. It supports multiple materials, ensures excellent film uniformity, and offers flexible process control for advanced coating development.

Technical Parameters:

No.ParameterSpecification
1ModelKS-PVD-MS450
2System   TypeHigh   vacuum multi-cathode magnetron sputtering system
3Loading   MethodManual   substrate loading
4Base   Pressure (Ultimate Vacuum)≤   5 × 10⁻⁷   mbar
5Working   Pressure Range1   – 5 mTorr
6Pressure   ControlAutomatic   pressure control
7Vacuum   MeasurementFull   range vacuum gauges
8Turbo   Molecular Pump Speed1200   L/s
9Dry   Backing Pump Speed4   L/s (≈14.4 m³/h)
10Number   of Magnetron Cathodes3   pcs
11Cathode   MountingTop-mounted
12Target   Size2   inch diameter
13Target   CoolingDirect   water cooling
14Source   ShuttersOne   shutter for each cathode
15Cathode–Substrate   DistanceAdjustable,   5 – 10 cm
16DC   Power Supplies2   units
17DC   Power Range0   – 600 W
18RF   Power Supply1   unit
19RF   Power Specification13.56   MHz, ≥ 600 W
20Compatible   Deposition MaterialsTi   / Pt / Au, AuGe / Ni / Au
21Process   GasArgon   (Ar), 99.999% purity
22Gas   Flow ControlMass   Flow Controller (MFC)
23Reactive   GasesN₂ / O₂   (optional)
24Thickness   MonitoringIn-situ   Quartz Crystal Monitor (QCM)
25Quartz   Crystals2   pcs
26Substrate   SizeUp   to 3 inch wafers
27Substrate   Heating TemperatureUp   to 500 °C
28Substrate   Rotation Speed0   – 20 rpm
29Film   Thickness Uniformity≤   3% within effective 3-inch area
30Control   SystemPC   / PLC control
31Software   PlatformCompatible   with Windows 10
32Power   Requirement220   – 240 VAC, 50 Hz