Home - Products - PVD Coating Machine - High-Vacuum Electron Beam Evaporation System for Optical and Functional Thin Films
The electron beam evaporation system is designed for high-vacuum thin-film deposition of optical, electronic, and functional materials.
It enables stable evaporation of high-melting-point materials with excellent film purity, uniformity, and adhesion.
The system is widely used in optical coatings, materials research, and advanced thin-film applications requiring deep vacuum and precise process control.
Technical Parameters
Technical Parameters：
| Item | Specification |
| Model | KS-PVD-EB900 |
| Chamber Type | Vertical front-opening vacuum chamber |
| Chamber Inner Size | Ø900 mm × 1050 mm |
| Chamber Material | SUS304 stainless steel |
| Number of Viewports | 2 (front door mounted) |
| Ultimate Vacuum | ≤ 8.0 × 10⁻⁴ Pa (clean, dry, unloaded) |
| Pump-down Time | From atmosphere to 8.0 × 10⁻³ Pa ≤ 15 min |
| Pressure Rise Rate | ≤ 0.67 Pa/h |
| Vacuum Pump Configuration | Diffusion pump + Roots pump + Rotary vane pumps |
| Diffusion Pump Speed | 8000 L/s × 2 units |
| Roots Pump Speed | 600 L/s |
| Roughing Pump Speed | 70 L/s |
| Holding Pump Speed | 15 L/s |
| Substrate Holder Type | Planetary rotation with revolution |
| Rotation Speed | 10–30 rpm, variable speed |
| Substrate Holder Sealing | Magnetic fluid seal |
| Heating System | Substrate heating system |
| Heating Temperature Range | Ambient to 300 °C (adjustable) |
| Evaporation Source (Resistance) | 2 × resistance evaporation sources |
| Resistance Source Power | 5 kW |
| Electron Beam Gun Power | 10 kW |
| Crucible Configuration | 8-position circular crucible |
| E-beam Scan Modes | Triangular / Sine / Square wave |
| Ion Source Power | 3 kW |
| Ion Source Type | Dual-filament ion source |
| Maximum Anode Current | 6 A |
| Gas Inlet Control | Mass flow controller |
| Film Thickness Monitoring | Quartz crystal thickness monitor |
| Thickness Control Mode | Automatic rate control and shutter control |
| Control System | Industrial PC + PLC |
| Operation Modes | Automatic / Semi-automatic / Manual |
| Human-Machine Interface | Touch screen HMI |
| Safety Protection | Over-current, over-load, over-temperature, interlock protection |
| Alarm Functions | Water, gas and system fault alarms |
