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The KS-PVD-SP150 Benchtop Plasma Magnetron Sputtering Coater is a compact thin-film deposition system designed for laboratory research and sample preparation. It features a transparent quartz glass vacuum chamber, Φ50 mm sputtering target, rotary vane vacuum pump, Pirani vacuum gauge, and touchscreen control system.
Technical Parameters
The KS-PVD-SP150 Benchtop Plasma Magnetron Sputtering Coater is a compact thin-film deposition system designed for laboratory research and sample preparation. It features a transparent quartz glass vacuum chamber, Φ50 mm sputtering target, rotary vane vacuum pump, Pirani vacuum gauge, and touchscreen control system. The system is suitable for sputtering Au, Pt, Pd and other metal materials, providing a convenient and reliable solution for thin-film preparation in universities, research institutes, and materials laboratories.
Technical Parameters:
| Parameter | Specification |
|---|---|
| Model | KS-PVD-SP150 |
| Product Name | Plasma Sputtering Coater |
| Vacuum Pump Type | Rotary vane vacuum pump (oil required) |
| Pumping Speed | 50 Hz: 8 m³/h (2.2 L/s); 60 Hz: 9.6 m³/h (2.6 L/s) |
| Ultimate Vacuum | 2 Pa |
| Working Pressure Range for Metal Sputtering | 8–20 Pa |
| Pump-down Time | <5 min to 2 Pa (Customer requires <3 min; to be confirmed) |
| Vacuum Gauge | Pirani vacuum gauge |
| Vacuum Gauge Measuring Range | From atmosphere to 2 × 10⁻² mbar |
| Chamber Diameter | Φ150 mm |
| Chamber Height | 120 mm |
| Chamber Wall Material | Scratch-resistant quartz glass |
| Sputtering Target Diameter | Φ50 mm |
| Sputtering Target Thickness | 0.1 mm for Au target; ≤2 mm required by customer |
| Maximum Sputtering Current | 100 mA |
| Control System | Touchscreen control |
| Touchscreen Size | ≥4 inches |
| User-interface Languages | English and Russian |
| Process Settings | Operator can select/set sputtering current, sputtering time and target material |
| Maximum Programmable Sputtering Time | ≥600 seconds |
| Supported Sputtering Materials | Au (Gold), Pt (Platinum), Pd (Palladium) |
| Target Source | Au, Ag, Pt (original specification) |
| Power Supply | AC 110 V, 60 Hz or AC 220 V, 50 Hz |
| Power Consumption | <1500 W |
| Cooling Method | Water cooling (optional) — customer requires air cooling; to be confirmed |
| Dimensions | 360 × 300 × 380 mm |
| Weight | 45 kg |
| Equipment Condition | Brand new, unused and non-refurbished |
| Warranty | Minimum 12 months, with lifetime product support |
