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KS-SP-AA4 is an economic desktop Vacuum Spin Coater which is designed for quality coating of sol-gel at the lowest cost.
It is suitable for photoresist and laboratary application.
Technical Parameters
KS-SP-AA4 is an economic desktop Vacuum Spin Coater which is designed for quality coating of sol-gel at the lowest cost. By using adhesive tape to stick and hold samples on the rotating plate, the instrument provides the advantages of cost effectiveness and ease of maintenance. Complete accessories such as vacuum chuck, oilless vacuum pump, electrical wire is included for immediately use.
Technical Parameters:
| Product model | KS-SP-AA4 |
| Chamber Size | 200 mm |
| Maximum Wafer Diameter | 4 inch (100 mm) |
| Spinning Speed Range | 100 to 12000 rpm (adjustable) |
| Acceleration Range | 100 to 30000 rpm/s |
| Speed Acceleration | 0.54167 |
| Max Single-Step Time | 3600 s |
| Spin Resolution | 1 RPM |
| Time Resolution | 1 s |
| Programmable Control | 5 sets of programmable control, each set with 5 steps |
| Motor | Brushless DC motor |
| Motor Power | 125 W |
| Vacuum Chuck | 10 mm / 25 mm / 50 mm (optional 75 mm / 100 mm, etc.) |
