Home - Products - Spin Coater and Spray Pyrolysis - 4 inch stainless steel chamber spin coater for for Semiconductor and Research Labs
The 4-inch stainless steel chamber spin coater is a compact and highly efficient thin-film coating system designed for precision laboratory and research applications. Featuring a durable stainless steel vacuum chamber, the system provides excellent corrosion resistance, easy cleaning, and long-term operational stability, making it ideal for handling a wide variety of chemical solutions and coating materials.
Technical Parameters
The 4-inch stainless steel chamber spin coater is a compact and highly efficient thin-film coating system designed for precision laboratory and research applications. Featuring a durable stainless steel vacuum chamber, the system provides excellent corrosion resistance, easy cleaning, and long-term operational stability, making it ideal for handling a wide variety of chemical solutions and coating materials. Its enclosed chamber structure helps minimize contamination during operation while improving coating consistency and process repeatability.
This spin coater is widely used for the preparation of uniform thin films on substrates such as silicon wafers, glass, quartz, ceramics, and metal plates. It is especially suitable for applications in semiconductor research, MEMS fabrication, solar cells, optical coatings, photoresist processing, nanomaterials, and advanced material development. The compact design allows it to fit easily into university laboratories, cleanrooms, and industrial R&D environments while maintaining professional-level coating performance.
Technical Parameters:
| Parameter | Specification |
|---|---|
| Product Model | KS-SP-SS4 |
| Chamber Size | 200 mm |
| Maximum Wafer Diameter | 4 inch (100 mm) |
| Spinning Speed Range | 100 to 12000 rpm (adjustable) |
| Acceleration Range | 100 to 30000 rpm/s |
| Speed Acceleration | 0.54167 |
| Max Single-Step Time | 3600 s |
| Spin Resolution | 1 RPM |
| Time Resolution | 1 s |
| Programmable Control | 5 sets of programmable control, each set with 5 steps |
| Motor | Brushless DC motor |
| Motor Power | 125 W |
| Vacuum Chuck | 10 mm / 25 mm / 50 mm (optional 75 mm / 100 mm, etc.) |
